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NANO- AND

MICROELECTROMECHANICAL

SYSTEMS

Fundamentals of

Nano- and Microengineering

A book in the

Nano- and Microscience, Engineering,

Technology and Medicine Series

NANO- AND

MICROELECTROMECHANICAL

SYSTEMS

Fundamentals of

Nano- and Microengineering

Sergey Edward Lyshevski

CRC Press

Boca Raton

London

New York

Washington, D.C.

Library of Congress Cataloging-in-Publication Data

Lyshevski, Sergey Edward.

Nano- and microelectromechanical systems : fundamentals of nano- and

microengineering / Sergey Edward Lyshevski.

p. cm. -- (Nano- and microscience, engineering, technology, and medicine series)

Includes index.

Includes bibliographical references and index.

ISBN 0-8493-916-6 (alk. paper)

1. Microelectromechanical systems. 1. Title. II. Series.

TK7875 .L96 2000

621.381—dc201

00-057953

CIP

This book contains information obtained from authentic and highly regarded sources. Reprinted material

is quoted with permission, and sources are indicated. A wide variety of references are listed. Reasonable

efforts have been made to publish reliable data and information, but the author and the publisher cannot

assume responsibility for the validity of all materials or for the consequences of their use.

Neither this book nor any part may be reproduced or transmitted in any form or by any means, electronic

or mechanical, including photocopying, microﬁlming, and recording, or by any information storage or

retrieval system, without prior permission in writing from the publisher.

The consent of CRC Press LLC does not extend to copying for general distribution, for promotion, for cre-

ating new works, or for resale. Speciﬁc permission must be obtained in writing from CRC Press LLC for

such copying.

Direct all inquiries to CRC Press LLC, 2000 N.W. Corporate Blvd., Boca Raton, Florida 33431.

Trademark Notice:

Product or corporate names may be trademarks or registered trademarks, and are

used only for identiﬁcation and explanation, without intent to infringe.

No claim to original U.S. Government works

International Standard Book Number 0-8493-916-6

Library of Congress Card Number 00-057953

Printed in the United States of America 1234567890

Printed on acid-free paper

To my family

PREFACE

This book is designed for a one-semester course on Nano- and

Microelectromechanical Systems or Nano- and Microengineering. A typical

background needed includes calculus, electromagnetics, and physics. The

purpose of this book is to bring together in one place the various methods,

techniques, and technologies that students and engineers need in solving a

wide array of engineering problems in formulation, modeling, analysis,

design, and optimization of high-performance microelectromechanical and

nanoelectromechanical systems (MEMS and NEMS). This book is not

intended to cover fabrication aspects and technologies because a great number

of books are available. At the same time, extremely important issues in

analysis, design, modeling, optimization, and simulation of NEMS and

MEMS have not been comprehensively covered in the existing literature.

Twenty first century nano- and microtechnology revolution will lead to

fundamental breakthroughs in the way materials, devices, and systems are

understood, designed, function, manufactured, and used. Nanoengineering

and nanotechnology will change the nature of the majority of the human-

made structures, devices, and systems. Current technological needs and

trends include technology development and transfer, manufacturing and

deployment, implementation and testing, modeling and characterization,

design and optimization, simulation and analysis of complex nano- and

microscale devices (for example, molecular computers, logic gates and

switches, actuators and sensors, digital and analog integrated circuits, et

cetera). Current developments have been focused on analysis and synthesis of

molecular structures and devices which will lead to revolutionary

breakthroughs in the data processing and computing, data storage and

imaging, quantum computing and molecular intelligent automata, etc.

Micro- and nanoengineering and science lead to fundamental breakthroughs

in the way materials, devices and systems are understood, designed,

function, manufactured, and used. High-performance MEMS and NEMS,

micro- and nanoscale structures and devices will be widely used in

nanocomputers, medicine (nanosurgery and nanotherapy, nonrejectable

artificial organ design and implants, drug delivery and diagnosis),

biotechnology (genome synthesis), etc.

New phenomena in nano- and microelectromechanics, physics and

chemistry, benchmarking nanomanufacturing and control of complex

molecular structures, design of large-scale architectures and optimization,

among other problems must be addressed and studied. The major objective

of this book is the development of basic theory (through multidisciplinary

fundamental and applied research) to achieve full understanding, optimize,

and control properties and behavior of a wide range of NEMS and MEMS.

This will lead to new advances and will allow the designer to

comprehensively solve a number of long-standing problems in analysis and

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